Rubber O-ring Perfluoro PFW

It has excellent plasma resistance and is used in dry etching equipment to manufacture semiconductors.

Description

Forte

Heat resistance guide*: 200°C
Standard hardness (Duro A): 70
It experiences little weight reduction when exposed to plasma and has excellent plasma resistance.
*The guide for heat resistance differs according to various conditions.

Application

Sealing for plasma etching equipment, plasma CVD equipment, etc.

Other

  • TOMBO is a registered trademark or trademark of NICHIAS Corporation.
  • Name of products with “®” are registered trademarks of NICHIAS Corporation.
  • Name of products with “™” are trademarks of NICHIAS Corporation.

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